The Linear Feedthrough -developed by the IFW- transmits fast moves of a compressed air drive through magnetic traction into the vacuum. It makes high dynamic opening and closing of covers in various vacuum systems possible. This technology replaces common susceptible vacuum linear feedthroughs. Disadvantages of common drives with pressure differences between atmosphere and the inside of the vacuum system are no longer present because of the closed system. So far the new linear feedthrough was engaged in coating systems ( e.g. Magnetron-Sputter-systems), where multi layers with the highest precision and high reproducibility are applicated.

• Cycle times of approx. 200 ms
• Closed system makes it suitable for ultra-high vacuum
• Modular structure

• Stroke
• Bake out up to 150 °C
• Companion flange

• Stroke
• Bake out up to 150 °C
• Companion flange
• Maximum force
• Admissable mass for transport
• Maximum frame size
• Cycle time
• Impulsion concept