HKZ Request

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Available System configurations:

All configurations include:

  • Process chamber in pressure range configuration
  • Control Unit – System control with 2x 27" touch screen process control display
  • Lamp power supply, Lamp power control incl. PLC integration
  • Process monitoring CCD camera; incl. PLC integration
  • Mirrorset (Upside and downside Mirror)
  • Pulling drive system with growth rate: 0.1-50 mm/h, Rotation: 0-70 rpm; Fast gear; incl. PLC integration; position sensor; stainless steel sample holder
  • Lamp moving system / focusing system, motorized driven x-, y-, z-axis by precision linear drives; incl. PLC integration
  • Light power shutter system to control the light energy; incl. PLC integration
  • Process window in the upper door for direct view of the growth process
  • Safety system with protection housing, door lock system, automatic shut down function
  • XBO Lamp 5000W
  • Protective clothing for lamp changing
  • Datalogging system; includes logging and transfer of all process data to ext. USB

Gas management:

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Oxygen
10 bar

Oxygen
50 bar

Oxygen
150 bar

Oxygen
300 bar


Argon
10 bar

Argon
50 bar

Argon
150 bar

Argon
300 bar


GRS1 pack

Gas cleaning system for Argon (reduces oxygen up to 10-11 O2); incl. PLC integration

GRS2 pack

Oxygen control system to check the oxygen rate; incl. PLC integration


Lamp power:

3kW

5kW

6.5kW

7kW

8kW

15kW


System application upgrades:

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T-Measuring pack T1

  • Patented in situ Temerature Measurement System with bi-color pyrometer (range 601-3300°C)
  • Incl. PLC integration
  • Available for all configurations

Video Application pack VA

  • Zoom, grid, snapshot, measuring at video picture of the sample during the growth process
  • Available for all configurations

Ramp function TR

Traveling ramp functions for pulling drive control (rotation and translation speed of both pulling drives to create time based traveling sequences)

Ramp function PR

Power ramp function for Power-shutter and lamp power control to create time based power sequences


Vacuum application upgrades:

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Vacuum V1

  • Vacuum turbo pump system
  • Vacuum connection up to 1*10-3mbar
  • Vacuum sensor up to 1*10-4mbar
  • Incl. PLC integration

Vacuum V2

  • Vacuum turbo pump system
  • Vacuum connection up to 1*10-5mbar
  • Vacuum sensor up to 1*10-9mbar
  • Incl. PLC integration

After Heater Units:

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After Heater Unit NH1

  • Afterheater T=1200°C
  • Usable in Atmosphere: Ar; N; O2
  • Available for SD

After Heater Unit NH2

  • Afterheater T=1200°C
  • Usable in Atmosphere: Ar; N
  • Available for all configurations

After Heater Unit NH3

  • Afterheater T=1200°C
  • Usable in Atmosphere: Ar; N; O2
  • Available for all configurations

After Heater Unit NH4

  • Afterheater T=1500°C
  • Usable in Atmosphere: Ar; N; O2
  • Available for all configurations


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